Glass composition consisting only of oxides which have reacted with fluorine at low temperatures to form volatile fluorides and uses thereof

Application Number: 200610099209.3 Application date: 2006.07.21
name: Glass composition consisting only of oxides which have reacted with fluorine at low temperatures to form volatile fluorides and uses thereof
Public (announcement) number: CN1899996 Public (announcement) day: 2007.01.24
Main classification number: C03C3/097 (2006.01)I The original application number of the division:
Classification number: C03C3/097(2006.01)I; C03B5/235(2006.01)I; C03C15/00(2006.01)I
Award day: priority: 2005.7.21 DE 102005034785.1
Application (patent) person: Scottrade
address: Mainz, Germany
Invention (design) person: Wolfgang Panhorst; Ulf Darman; Ulrich Fosslingham; Jurgen Leb; Reina Liebal International application:
International announcement: Enter country date:
Patent agency: Beijing Lumeng Intellectual Property Agency Co., Ltd. agent: Wang Yunfang; Liu Guowei
Summary
This invention relates to a novel glass composition comprising only oxides which form volatile fluorides at low temperatures and their use in microfabrication processes.

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